Transmission electron microscopy

A JEOL JEM-2100F is a field emission gun transmission electron microscope equipped with an imaging spherical aberration corrector (CEOS), Oxford INCA Energy TEM 200 EDS system, high-angle annular dark field detector, Gatan annular dark field detector/bright field detector, as well as Gatan (Tridiem) image filter (GIF) system. With the aberration corrector, the ultrahigh resolution atom imaging of crystal lattice can be readily achieved.

Focused Ion Beam sample preparation

FIB-milled small-scale specimens for TEM and micromechanical characterization such as cantilever beams, pillars etc. are prepared using a ZEISS LEO 1540XB CrossBeam microscope with a variety of different currents to minimize surface contamination or irradiation damage and to provide suitable samples for in-situ measurements.